Plasma processing

Plasma processing is a plasma-based material processing technology that aims at modifying the chemical and physical properties of a surface.

Plasma processing techniques include:

• Plasma activation
• Plasma ashing
• Plasma cleaning
• Plasma electrolytic oxidation
• Plasma etching
• Plasma functionalization
• Plasma polymerization
• Corona treatment
• Plasma modification

Related topics are plasma chemistry, chemical vapor deposition, and physical vapor deposition processes like sputter deposition, plasma iondoping, vacuum plasmaspraying, and reactive ion etching.