Oxalyl fluoride
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Oxalyl fluoride is the organofluorine compound with the formula (COF)2. It is a fluorinated derivative of oxalic acid. This colorless liquid is prepared by reaction of sodium fluoride with oxalyl chloride.[1]
Oxalyl fluoride is being investigated for use in etching as a replacement for compounds which have the liability of high global warming potential.[2][3]
See also
References
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- ↑ Method of etching and cleaning using fluorinated carbonyl compounds, US Patent 6635185.
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