HARMST
Jump to navigation
Jump to search
Script error: No such module "Unsubst". HARMST is an acronym for high aspect ratio microstructure technology, which describes fabrication technologies, used to create high-aspect-ratio microstructures[1] with heights between tens of micrometers up to a centimeter, and aspect ratios greater than 10:1. Examples include the LIGA fabrication process, advanced silicon etch, and deep reactive ion etching.
See also
References
<templatestyles src="Reflist/styles.css" />
- ↑ Script error: No such module "citation/CS1".
Script error: No such module "Check for unknown parameters".