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...scription|Process used to produce micromachinery or microelectromechanical systems}} ...s a process used to produce [[micromachinery]] or [[microelectromechanical systems]] (MEMS). ...

{{Short description|Microelectromechanical system device}} ...jita|first1=Hiroyuki|last2=Toshiyoshi|first2=Hiroshi|title=Micro actuators and their applications|journal=Microelectronics Journal|publication-date=Septem ...

...|date=August 1998 |title=Surface micromachining for microelectromechanical systems |journal=Proceedings of the IEEE |volume=86 |issue=8 |pages=1552–1574 |doi= ...ain advantage of this machining process is the ability to build electronic and mechanical components (functions) on the same substrate. Surface micro-mach ...

{{Short description|System of microelectromechanical devices}} ...[[millimeter]]s and they may be vulnerable to electromagnetic disablement and destruction by microwave exposure. ...

...81439837320|location=Boca Raton, FL|pages=7}}</ref> It focuses on physical and chemical processes as well as the production or manipulation of structures ...roved performance, functionality, and reliability, all while reducing cost and increasing volume. This development led to the [[Information Revolution]]. ...

{{Short description|Fabrication at micrometre scales and smaller}} ...rized copper interconnect, down to the polysilicon (pink), wells (greyish) and substrate (green)]] ...

...}}</ref> the function of the lungs in the form of a [[capnograph]] device, and many industrial processes. ...bonate based CO₂ sensors with high performance |journal=Sensors and Actuators B: Chemical |volume=34 |issue=1–3 |pages=383–7 |date=1996 |doi=10 ...

...ral design of a physical device, or system, often comprising both hardware and software. For other uses, see for example [[Computer architecture]], [[Comp ...ime dynamic behavior identification and selection |journal=Knowledge-Based Systems |volume=21 |issue=4 |pages=273–283 |year=2008|doi=10.1016/j.knosys.2007.05. ...

| foundation = {{start date and age|1997}} (merger of KLA and Tencor) ...[Wafer (electronics)|wafer]], [[reticle (semiconductor industry)|reticle]] and other related industries ...

Include the dates applicable if possible, and separate each name with a linebreak. | Harvard_designation = <!--spacecraft launched 1962 and earlier only (e.g. 1957 Alpha 2)--> ...

{{short description|Type of ultraviolet laser important in chip manufacturing and eye surgery}} ...rated circuit]]s or "chips", [[eye surgery]], and [[microelectromechanical systems|micromachining]]. ...

...ed to [[DARPA]] in 1986 first introducing the term "microelectromechanical systems"]] ...rroundings (such as [[microsensor]]s).<ref>{{cite book|title=Nanocomputers and Swarm Intelligence|vauthors=Waldner JB|publisher=[[ISTE Ltd|ISTE]] [[John W ...

...stem]]s" (μTAS). LOCs may use [[microfluidics]], the physics, manipulation and study of minute amounts of fluids. However, strictly regarded "lab-on-a-chi [[File:Labonachip20017-300.jpg|thumb|[[Microelectromechanical systems]] [[integrated circuit|chip]], sometimes called "lab on a chip"]] ...

...to UV become cross-linked, while the remainder of the film remains soluble and can be washed away during development. ...07/s00542-002-0242-2|bibcode=2004MiTec..10..265L |s2cid=111062837 }}</ref> and (>&nbsp;40) has been demonstrated from the dry resist.<ref>{{Cite journal | ...

...powerful [[fluorinating agent]] with the chemical formula {{chem|XeF|2}}, and one of the most stable [[xenon compounds]]. Like most [[Covalent bond|coval It has a nauseating odour and low [[vapor pressure]].<ref>{{cite book |author1=James L. Weeks |author2=Ma ...

...ps://onlinelibrary.wiley.com/doi/10.1111/php.12751 |journal=Photochemistry and Photobiology |language=en |volume=93 |issue=5 |pages=1165–1169 |doi=10.1111 ...[extreme ultraviolet lithography|extreme ultraviolet lithography (EUVL)]], and [[X-ray lithography]]. The wavelength of light used determines the minimum ...

...ion with high reliability and low g-sensitivity. The nanoscale transistors and nanoscale mechanical components (on a separate die) are integrated on the s ...2 = Massimiliano Di Ventra}}</ref> Applications include [[accelerometer]]s and sensors to detect [[chemical substance]]s in the air. ...

...]], [[control system]]s, [[signal processing]], [[optics]], [[photonics]], and [[electrical substation]]s ...abstract thinking, analytical thinking (see also [[Glossary of electrical and electronics engineering]]) ...

...829–1891)<br />The Mechanics Institute (1885–1891)<br />Rochester Athenæum and Mechanics Institute (1891–1944) | established = {{Start date and age|1829}} ...